| Abstract [eng] |
The invention relates to systems for determining the dimensions and surface relief of micrometre-sized spatial objects by generating a composite image of the examined spatial object using the microscope. The invention aims to improve the detection quality when object is transparent or partially transparent or when the surface of the object is soft and/or easily damaged. The examined three-dimensional micrometre-sized object is photographed from above with a microscope, and the contour of the micrometre-sized object is determined by the sensor with an electrode for measuring electrochemical properties between the sensitive surface of the mentioned electrode and the surface of the micrometre-sized object at each scanning point, thus determining the height of object under investigation and its coordinates at each point at the scanned point. Thanks to the program installed in the computer processor, a general image of the examined spatial micrometre-sized object with its real dimensions and its surface relief is obtained. |
